English
公共實驗室及設備
VLSA Lab. Tze-Chiang Foundation of Science & Technology
Semiconductor process Lab.
  1. Furnace
  2. Evaporator
  3. Aligner
  4. Microscope
  5. Monitor
  6. Video graphic printer
  7. Probe Station
  8. Four-point Probe
  9. Digital multimeter
  10. Oven
  11. Spinner
  12. Heat Plate
  13. Clean Bench
  14. Microwave oscillator
  15. DI water System
Microelectronic Lab.
    PART I:
  1. E-gun
  2. PECVD
  3. Plasma etching
  4. Sputter
  5. Evaporator
    PART II:
  1. RTA
  2. Electric scale
  3. Clean Bench
  4. Furnace
  5. Evaporator
    PART III:
  1. Aligner
  2. Microscope
  3. Clean Bench
  4. Spinner
  5. Optical table
  6. Oven
  7. DI water System
各實驗室及室內設備
Lab. Location:工三館111B
Lab. Ext：
Lab. Website :
Administrator : Prof. Chih-Fang Huang
寬能隙半導體相關研究設備
Hot chuck (Instec HCC601-STC20A)
Multimeter (Keithley Model 2000)
1700C Tube furnace
RTA (ULVAC MILA-3000) (Lindberg/Blue)
Semiconductor parameter analyzer (HP 4145B)
Dual-channel system source meter instru. (Keithley 2602 SMU)
High0voltage supply (Keithley Model 248)
Lab. Location:教育館 R111
Lab. Ext：34034
Lab. Website : Microelectronics Lab.
Administrator : Prof. Ya-Chin King
Ａ•通用I-V測試站
Semiconductor Parameter Analyzer HP4145B
Precision Semiconductor Parameter Analyzer HP4142A
Module DC Source/Monitor HP4156A
Source/Monitor Unit HP41421B
50MHz Dual Channel Pulse Generator HP8115A
150MHz Dual Channel Pulse Generator HP8110A
100V/2A Pulse Generator HP8114A
Digitizing Oscilloscope HP54504A
20Hz~1MHz Precision LCR Meter HP4284A
PA Meter/DC Source HP4140B
SMU and Pulse Generator Expander HP41501A
Ｂ•高功率元件測試站
High Current Source/Monitor Unit HP41422A
High Voltage Source/Monitor Unit HP41423A
Power Generator GPR-3010HD
100V/2A Pulse Generator HP8114A
150MHz Dual Channel Pulse Generator HP8110A
Semiconductor Parameter Analyzer HP4145B
Digitizing Oscilloscope HP54504A
Ｃ•快閃記憶體測試站
50MHz Dual Channel Pulse Generator HP8115A
150MHz Dual Channel Pulse Generator HP8110A
Digitizing Oscilloscope HP54504A
Module DC Source/Monitor HP4142A
Source/Monitor Unit HP41421B
Switch/Control Unit HP3488A
Switch Matrix HP44473A
Ｄ•光感測元件測試站
50MHz Dual Channel Pulse Generator HP8115A
Digitizing Oscilloscope HP54504A
Switch/Control Unit HP3488A
Precision Semiconductor Parameter Analyzer HP4156A
100V/2A Pulse Generator HP8114A
Autoranging Picoammeter KIETHLEY 485
SMU and Pulse Generator Expander HP41501A
Power Generator GPR-3010HD
Lab. Location:工三館 301
Lab. Ext：34050
Lab. Website : Nanoelectronics Lab.
Administrator : Prof. Po-Wen Chiu
奈米電子相關研究設備
Scanning electron microscope JOEL 840A
Raith proxy writer
Probe station
Liquid-nitrogen cryogenic transport system
Cryogen-free He4 transport system
Cryogen-free He3/He4 transport system
Electrical measurement system
Mini pumping station
Scanning probe microscope
Aplha-step
Optical microscope
Critical point dryer
Plasma cleaner
Wire bonder
Centrifuge
Ultrasonic liquid processor

Lab. Location:教育館111
Lab. Ext：34107
Lab. Website : NeuroEngineering Lab.
Administrator : Prof. Hsin Chen
神經工程相關研究設備
混合信號示波器
類比信號示波器
任意波形產生器
電源供應器
DELL儀控工作站
多功能資料擷取卡
類比探棒
數位探棒
CMOS MEMS Lab.
Lab. Location:教育館111
Lab. Ext：
Lab. Website :
Administrator : Prof. Shiang-Cheng Lu
CMOS微機電相關研究設備
Probe station
HP 4395A Spectrum/Network Analyzer
Lock-in Amplifier (Stanford Research SR844)
Nanovoltmeter (Keithley 2182A)
pA current meter (Keithley 6514)
Digial oscilloscope (Agilent DSO 5014A)
Digital Multimeter (Agilent 33401A)
Amorphous Semicouductors Lab.
  1. PC-486
  2. PC-586
  3. HP laser printer
  4. HP deskjet
Low-Dimensional Device Physics and Ultrafast Lab.
  1. Spectral Physics Tsunami pulsed Ti:sapphire
  2. Coherent Innova 400
  3. Coherent 890,Ti:sapphire,WaveScan
  4. JEOL 840A
  5. Raith Proxy Writer
High Frequency Measurement
  1. HP8510C
  2. HP8517B Frequency Syntheizer
  3. HP4142 Power Supply
  4. HP Test Set
  5. HP Workstation
  6. High-f IC-CAP Software
  7. Summit 9000 Probe Station
  8. HP 84124A Oscilloscope
  9. PSPL 4015C Pulse Generato
Game Lab.
  1. PECVD
  2. ECR-CVD, and thin film fabrication facilities
  3. E-beam lithography and complete facilities for submicron device fabrication
  4. HREEL and bulk and surface analyzing facilities
Micro-Electro-Mecha-Optical System (MEMOS) Lab.
  1. Standard Microelectronics Processing Equipment
  2. MEMS Special Processing Equipment
Semiconductor Device & Processes Lab.
    1. Electromigration reliability system: including
    1. Vacuum furnace
    2. HP 3440
    3. HP 6030
    4. HP 3488A
    5. Mechanical pump
    2. Semiconductor electrical measurement system: including
    1. HP 4140B
    2. HP 4275A
    3. HP 4145A
    4. HP 4294A
    5. HP 4156A
    6. Probestation & monitor
    3. Rapid Thermal Annealing: including
    1. Infarad gold image furnace
    2. Thermal program controllor
    3. Mechanical pump
  4. LPCVD(Low pressure chemical vapor deposition)--Deposition of AL & TiN
  5. LPCVD(Low pressure chemical vapor deposition)--Deposition of TaN
  6. Vacuum sputter system
  7. Personal Computers
Noisy Measurement Lab.
    1. Semiconductor Parameters Analyzing Systems
    1. I-V measurement systems
    2. C-V measurement systems
    3. High Power Transistor Curve Tracer
    4. 80K-450K Variable Temp. System
    2. Noise Measurement System
    1. Shielded Rood
    2. Spectrum Analyzer
    3. Low Noise Pre-amp
    4. Arbitrary waveform generator
    3. PC's & Printers
    1. PC586, PC686
    2. HP LaserJet 5MP
    3. HP DestJet 670C
    4. Workstations
    1. Sun Spark5
    2. Acer & Sertek
Microelectronic Devices and Matrials Lab.
  1. RF magnetron sputtering system
  2. Plasma enhanced chemical vapor deposition(PECVD) system
  3. I-V test system
  4. C-V test system
  5. Low temperature measurement system
  6. Anneling furnace
  7. Personal computer
Epitaxy and Optoelectronic Devices Lab.
  1. Liquid-phase epitaxy
  2. Rapid thermal annealing
  3. Optical microscope
  4. HP4156 parameter analysis
  5. HP4280 capacitance-voltage meter
  6. Photoluminescence (in Room:117 Engineering III Building)
Semiconductor Physics and Devices Simulation Lab.
  1. HP 9000/720 Workstation
  2. IBM 6000/320
  3. SUN 4/60
  4. HP laser printers X 2
  5. MP plotter
  6. Personal Computers
  7. SUN ELC
  8. DEC 3000
Laser Characteristice and Applications Lab.
  1. RF Power generators
  2. RF Spectrum analyzer
  3. Digitizing oscilloscope
  4. RF-excited CO2 laser
  5. Laser cooling circulator
  6. 2.0um DFB laser diode
  7. Laser diode driver and temperature controller
  8. Grating spectrumeter
  9. Laser spectrum analyzer
  10. High Voltage power supply
  11. Lock-in amplifier
  12. Boxcer integrator
  13. Optical chopper
  14. PC-486
  15. PC-586
  16. Vacuum system and gauge